Semiconductor/FPD/High-performance Film
Evolutionary bearings able to move machinery in special environments

Semiconductors, liquid crystal and their component, high-performance film, are an accumulation of state-of-the-art technologies and indispensable to our modern day lives. The performance of these products is improving day by day and the parts used in the manufacturing equipment that make such products are required to operate in extremely harsh environments, such as clean, high-temperature and corrosive environments. "Special Environment Bearing Series Ceramic Bearings - EXSEV Bearings" are bearings developed by leveraging material, surface treatment and lubrication technologies to withstand a variety of tough environments.

Product list
Bearings for thermal processing film formation equipment

Thermal processing film formation equipment adopt special bearings capable of lubrication even at high temperatures.

Bearings for exposure equipment

Bearings of exposure equipment are used in strong magnetic fields therefore are made from non-magnetic ceramic.

Bearings for etching equipment

Bearings of etching equipment are exposed to etching solution during operation, therefore corrosion-resistant ceramic bearings and stainless steel are adopted.

Bearings for ion injection equipment

Clean bearings that do not generate impurities due to wear, etc. through lubrication in a vacuum are adopted in the vacuum chamber of ion injection equipment.

Bearings for sputtering equipment

The high-temperature clean pro bearing is used in the high-temperature vacuum section of sputtering equipment.

Bearings for CMP equipment

Bearing of CMP equipment are used in environments exposed to abrasive, therefore corrosion-resistant ceramic bearings and PTFE-coated bearings are adopted.

Bearings for inspection equipment

A non-magnetic bearing is adopted in inspection equipment so as not to affect inspection results.

Bearings for wafer transfer equipment

Wafer transfer equipment demands low particle emission and long life. As such, ceramic bearing combined with the thin-wall K-Series full complement ball type are adopted.

Bearings for LCD polarizing plate film production equipment

Various solutions such as acids, alkalis, dyes and pure water are used in the polarizing plate film production line.

Related examples of use
Practical realization of the world's first ceramic bearing in 1984
Reliable, corrosion-resistant and suitable for use in solutions
80% less uneven rotation! (compared with a planetary gear)
A precision reduction gear adopting Koyo bearing technology
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